A 0.021 μm² trigate SRAM cell with aggressively scaled gate and contact pitch

We present the highest density demonstration of CMOS technology reported to date featuring a 6T SRAM cell size of 0.021 μm2 (Fig. 1). The motivation for this work was to explore the limits of device patterning and basic module integration at dimensions relevant to the 10 nm node [1]. A trigate device architecture with a minimum contacted gate pitch (CGP) and minimum contacted fin pitch (CFP) of 50 nm was used as the target technology for this demonstration. © 2011 JSAP (Japan Society of Applied Physi.