Mitigating X‑ray–Induced Damage in CD‑SAXS Metrology of EUV Resists
- Philipp Wieser
- Kevin Yager
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Publications
204 results for Christian Lavoie
Controlled Growth of Oriented CoSi Nanowires in Dielectric Trenches via Chemical Vapor Deposition
- Jiaqi Wang
- Zixu Wang
- et al.
- 2025
- MRS Fall Meeting 2025
Solid phase van der Waals epitaxy of PtCoO2 on fluorphlogopite mica by plasma enhanced atomic layer deposition
- Peter Zhang
- Jiaqi Wang
- et al.
- 2025
- MRS Fall Meeting 2025
Nanoscale phase separation in Al0.4–Sb0.6 alloy for phase change memory applications
- Rubab Ume
- Haibo Gong
- et al.
- 2025
- AIP Advances
Measurement of CoFeB configurational ordering in magnetic random-access memory stacks using extended x-ray absorption fine structure spectroscopy
- Matthias Gottwald
- Christian Lavoie
- et al.
- 2025
- Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
Transport properties of chiral topological material epitaxial thin films: a comparative study between CoSi and CoSi2
- En-de Chu
- Jason Tran
- et al.
- 2025
- APS Global Physics Summit 2025
Identifying and Removing Artifacts Formed During FIB TEM Sample Preparation of Semiconductor Devices
- Lynne Gignac
- John Bruley
- et al.
- 2025
- AReMS 2025
Electron scattering at interfaces in Ru(0001)/Co(0001) multilayers
- Poyen Shen
- Christian Lavoie
- et al.
- 2025
- Journal of Applied Physics
Challenges in the implementation of artificial intelligence hardware based on phase change devices
- Guy Cohen
- Amlan Majumdar
- et al.
- 2024
- MRS Fall Meeting 2024
A GexSe1-x switch-only-memory technology through polarized atomic distribution
- Zhi-Lun Liu
- Alexander Grun
- et al.
- 2024
- Scientific Reports