Publications

22 results for William S. Graham

Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer
- - Sebastian U. Engelmann
  - Robert L. Bruce
  - et al.
- 2017
- JVSTB
Patterning of CMOS device structures for 40-80nm pitches and beyond
- - Sebastian U. Engelmann
  - R.M. Martin
  - et al.
- 2012
- SPIE Advanced Lithography 2012
A 0.021 μm² trigate SRAM cell with aggressively scaled gate and contact pitch
- - Michael A. Guillorn
  - Josephine Chang
  - et al.
- 2011
- VLSI Technology 2011
Gate-all-around silicon nanowire 25-stage CMOS ring oscillators with diameter down to 3 nm
- - Sarunya Bangsaruntip
  - A. Majumdar
  - et al.
- 2010
- VLSI Technology 2010
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Trigate 6T SRAM scaling to 0.06 μm²
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- IEDM 2009
FinFET performance advantage at 22nm: An AC perspective
- - M. Guillorn
  - J. Chang
  - et al.
- 2008
- VLSI Technology 2008
A practical implementation of silicon microchannel coolers for high power chips
- - Evan G. Colgan
  - Bruce Furman
  - et al.
- 2007
- IEEE Transactions on Components and Packaging Technologies
Silicon-on-insulator MOSFETs with hybrid crystal orientations
- - M. Yang
  - K.K. Chan
  - et al.
- 2006
- VLSI Technology 2006
A practical implementation of silicon microchannel coolers for high power chips
- - E.G. Colgan
  - B.K. Furman
  - et al.
- 2005
- SEMI-THERM 2005