Publications

27 results for Ernst Kratschmer

Photonic Metacrystal: Design and Experimental Results
- - S. Hu
  - Marwan H. Khater
  - et al.
- 2022
- CLEO 2022
Photonic metacrystal: Design methodology and experimental characterization
- - S. Hu
  - Marwan H. Khater
  - et al.
- 2022
- Optics Express
Experimental realization of deep-subwavelength confinement in dielectric optical resonators
- - Shuren Hu
  - Marwan Khater
  - et al.
- 2018
- Science Advances
Silicon Nanowire Field Effect Transistor Sensors with Minimal Sensor-to-Sensor Variations and Enhanced Sensing Characteristics
- - Sufi Zafar
  - Christopher P. D’Emic
  - et al.
- 2018
- ACS Nano
Bowtie photonic crystal with deep subwavelength mode confinement in a dielectric material
- - Shuren Hu
  - Marwan Khater
  - et al.
- 2017
- CLEO 2017
Fabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales
- - Jingwei Bai
  - Deqiang Wang
  - et al.
- 2014
- Nanoscale
Contamination mitigation of hydrogen silsesquioxane resist processed with Na⁺-containing developer for nanoscale CMOS device patterning
- - Markus Brink
  - Isaac Lauer
  - et al.
- 2014
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules
- - C. Wang
  - S.W. Nam
  - et al.
- 2013
- IEDM 2013
Dot-matrix marks for dynamic overlay measurements in electron beam lithography
- - Ernst Kratschmer
  - James J. Bucchignano
  - et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Patterning of CMOS device structures for 40-80nm pitches and beyond
- - Sebastian U. Engelmann
  - R.M. Martin
  - et al.
- 2012
- SPIE Advanced Lithography 2012