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Dario Goldfarb

Title

Research Staff Member
Dario Goldfarb

Publications

  • Dry heterometallic resist processing based on thermal sublimation deposition and development

      • Dario Goldfarb
      • Scott Lewis
      • et al.
    • 2022
    • JM3
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Patents

    • 05 Mar 2013
    • US
    • 8388758

    Apparatus And Method For The Rapid Thermal Control Of A Work Piece In Liquid Or Supercritical Fluid

    • 12 Feb 2013
    • US
    • 8373271

    Interconnect Structure With An Oxygen-doped Sic Antireflective Coating And Method Of Fabrication

    • 15 Jan 2013
    • US
    • 8354336

    Forming An Electrode Having Reduced Corrosion And Water Decomposition On Surface Using An Organic Protective Layer

    • 23 Oct 2012
    • US
    • 8293451

    Near-infrared Absorbing Film Compositions

    • 28 Aug 2012
    • GB
    • 2484880

    Near-infrared Absorbing Film Compositions

    • 27 Jul 2012
    • JP
    • 5044812

    Apparatus And Method For Reducing Contamination In Immersion Lithography

    • 20 Mar 2012
    • US
    • 8137874

    Organic Graded Spin On Barc Compositions For High Na Lithography

    • 28 Feb 2012
    • US
    • 8124485

    Molecular Spacer Layer For Semiconductor Oxide Surface And High-k Dielectric Stack

    • 27 Dec 2011
    • US
    • 8084193

    Self-segregating Multilayer Imaging Stack With Built-in Antireflective Properties

    • 13 Sep 2011
    • US
    • 8017303

    Ultra Low Post Exposure Bake Photoresist Materials

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Work location

IBM Research - Yorktown HeightsYorktown Heights, NY USA

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