Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Dario Goldfarb
Title
Research Staff Member
Patents
- US
- 12033856
- US
- 12019376
- CN
- ZL 2018 8 0081456.1
- US
- 11906901
- JP
- 7219278
- US
- 11556057
- US
- 11500290
- US
- 11462512
- GB
- 2583206
- US
- 11367617