Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Dario Goldfarb
Title
Research Staff Member
Patents
- JP
- 4755529
- US
- 7892705
- US
- 7869002
- US
- 7816069
- US
- 7807335
- US
- 7787101
- US
- 7782445
- US
- 7727708
- CN
- ZL200610144473.4
- CN
- ZL200710004363.2