Dario Goldfarb

Patents

• • 25 Nov 2019
  • US
  • 10490481

  Copper Microcooler Structure And Fabrication
• • 19 Aug 2019
  • US
  • 10386716

  Mechanical Isolation Control For An Extreme Ultraviolet (euv) Pellicle
• • 19 Aug 2019
  • US
  • 10388521

  Method To Increase The Lithographic Process Window Of Extreme Ultra Violet Negative Tone Development Resists
• • 08 Jul 2019
  • US
  • 10345702

  Polymer Brushes For Extreme Ultraviolet Photolithography
• • 08 Jul 2019
  • US
  • 10347486

  Patterning Material Film Stack With Metal-containing Top Coat For Enhanced Sensitivity In Extreme Ultraviolet (euv) Lithography
• • 03 Jun 2019
  • US
  • 10312087

  Method To Improve Adhesion Of Photoresist On Silicon Substrate For Extreme Ultraviolet And Electron Beam Lithography
• • 29 Apr 2019
  • US
  • 10276384

  Plasma Shallow Doping And Wet Removal Of Depth Control Cap
• • 25 Mar 2019
  • US
  • 10241396

  Mechanical Isolation Control For An Extreme Ultraviolet (euv) Pellicle
• • 08 Oct 2018
  • US
  • 10096477

  Method To Improve Adhesion Of Photoresist On Silicon Substrate For Extreme Ultraviolet And Electron Beam Lithography
• • 23 Apr 2018
  • US
  • 9950349

  Drying An Extreme Ultraviolet (euv) Pellicle