Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Dario Goldfarb
Title
Research Staff Member
Patents
- US
- 10828678
- US
- 10748823
- US
- 10727055
- US
- 10678135
- US
- 10656523
- US
- 10569307
- US
- 10553432
- US
- 10553516
- US
- 10553522
- US
- 10490480