Dario Goldfarb

Title

Research Staff Member

Publications

IBM Lithography Roadmap and Need for Future Lithography Tools
- - Allen Gabor
  - Martin Burkhardt
  - et al.
- 2025
- EUVL and Source Workshop 2025
Dry heterometallic resist processing based on thermal sublimation deposition and development
- - Dario Goldfarb
  - Scott Lewis
  - et al.
- 2022
- JM3

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Top collaborators

LM

Luciana Meli

Luciana Meli

Senior Manager: Patterning & Metrology

JR

Jed Rankin

Jed Rankin

Photomask Supply and Development Strategy

AG

Allen Gabor

Allen Gabor

Distinguished Engineer