Reduction of edge penetration effect in the scanning electron microscope
- Oliver C. Wells
- 2011
- Scanning
Paper
Publications
20 results at Scanning
Quantitative image mode voltage contrast
- Keith A. Jenkins
- 2011
- Scanning
PaperEffects of collector take‐off angle and energy filtering on the BSE image in the SEM
- Oliver C. Wells
- 2011
- Scanning
ReviewUse of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope
- Oliver C. Wells
- L. Gignac
- et al.
- 2006
- Scanning
PaperApplication of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples
- Oliver C. Wells
- Maurice McGlashan-Powell
- et al.
- 2001
- Scanning
PaperStudies of samples having shallow surface topography by the low-loss electron (LLE) method in the scanning electron microscope (SEM)
- O.C. Wells
- Maurice McGlashen-Powell
- et al.
- 2000
- Scanning
PaperComparison of different models for the generation of electron backscattering patterns in the scanning electron microscope
- Oliver C. Wells
- 1999
- Scanning
PaperCombined charge collection and cathodoluminescence (EBIC/CL) characterization of defects
- A. Jakubowicz
- 1991
- Scanning
Conference paperThe use of the low voltage SEM in IC fabrication
- Michael G. Rosenfield
- 1991
- Scanning
Conference paperThe study of the Cu/Al/Au thin film system by electron microscopy
- P.J. Bailey
- P.B. Madakson
- 1991
- Scanning
Conference paper