Michael G. Rosenfield, A. Starikov
Microelectronic Engineering
Conference paper
The use of the low voltage SEM in IC fabrication
Related
R. Puri, C.T. Chuang, et al.
IEEE Journal of Solid-State Circuits
W. Hwang, C.T. Chuang, et al.
International Journal of Electronics
Conference paper
Performance analysis of tapered gate in PD/SOI CMOS technology
W. Hwang, C.T. Chuang, et al.
VLSI-TSA 2001