R. Puri, C.T. Chuang, et al.
IEEE Journal of Solid-State Circuits
Conference paper
The use of the low voltage SEM in IC fabrication
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W. Molzen, Michael G. Rosenfield, et al.
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Conference paper
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
Y. Taur, S.J. Wind, et al.
IEDM 1993
Michael G. Rosenfield, S. Rishton, et al.
Microelectronic Engineering