Publications

85 results for Frances A. Houle

Deep-ultraviolet interferometric lithography as a tool for assessment nf chemically amplified photoresist performance
- - W.D. Hinsberg
  - F.A. Houle
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
In situ Fourier transform infrared spectroscopy and stochastic modeling of surface chemistry of amorphous silicon growth
- - U. Wetterauer
  - J. Knobloch
  - et al.
- 1998
- Journal of Applied Physics
Paper
Stochastic simulation of heat flow with application to laser-solid interactions
- - F.A. Houle
  - W.D. Hinsberg
- 1998
- Applied Physics A: Materials Science and Processing
Paper
Mechanistic studies of chemically amplified photoresists
- - W.D. Hinsberg
  - G.M. Wallraff
  - et al.
- 1997
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Paper
Stochastic simulations of temperature programmed desorption kinetics
- - F.A. Houle
  - W.D. Hinsberg
- 1995
- Surface Science
Paper
Kinetics of chemically amplified resists
- - G.M. Wallraff
  - W.D. Hinsberg
  - et al.
- 1995
- Microlithography 1995
Conference paper
Simulations of thermal decomposition and film growth from the group VI metal hexacarbonyls
- - F.A. Houle
  - W.D. Hinsberg
- 1995
- Journal of Physical Chemistry
Paper
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Paper
Electron impact fragmentation of gases by molecular beam mass spectrometry. Application to AsCl₃ and a GaCl₃/Ga₂ Cl₆ mixture
- - F.A. Houle
- 1993
- International Journal of Mass Spectrometry and Ion Processes
Paper
Chemical changes accompanying facet degradation of AlGaAs quantum well lasers
- - F.A. Houle
  - D. Neiman
  - et al.
- 1992
- Journal of Applied Physics
Paper