Electron impact fragmentation of gases by molecular beam mass spectrometry. Application to AsCl₃ and a GaCl₃/Ga₂ Cl₆ mixture

Molecular beam mass spectrometry is a powerful method for anlayzing and characterizing gas mixtures. Realization of the full potential of the technique requires that accurate simulations of the data be available for comparison to experiment. In this paper, details of how simulations can be optimized for a specific instrument are presented. The utility of the combination of theory and experiment is illustrated by determination of the cracking patterns of AsCl3, and GaCl3 in equilibrium with Ga2Cl6. The results are in poor agreement with previous determinations and origins of the discrepancies are discussed. © 1993.