Publications

85 results for Frances A. Houle

Introduction of role playing to a research ethics module for the undergraduate
- - Dolores C. Miller
  - Frances A. Houle
  - et al.
- 2009
- MRS Fall Meeting 2009
Characterization of vinyl ether UV-cure nanoimprint resist
- - Taiichi Furukawa
  - Frances A. Houle
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Cr migration on 193nm binary photomasks
- - John Bruley
  - Geoffrey Burr
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Quantitative measurement of resist outgassing during exposure
- - Nicolae Maxim
  - Frances A. Houle
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Quantification of outgassing of C-, Si-, and S-containing products during exposure of photoresists
- - F.A. Houle
  - N. Maxim
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Evaluation of 32nm Advanced immersion lithography pellicles
- - N. Zhou
  - K. Racette
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Chemical and mechanical properties of UV-cured nanoimprint resists and release layer interactions
- - Frances A. Houle
  - Ann Fornof
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Nanoimprint materials systems
- - F.A. Houle
  - D.C. Miller
  - et al.
- 2008
- J. Photopolym. Sci. Tech.
Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
- - F.A. Houle
  - S. Raoux
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nanoimprint lithography
- - Frances A. Houle
  - Ann Fornof
  - et al.
- 2007
- SPIE Advanced Lithography 2007