High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
Paper
Publications
32 results for Hiroyuki Hiraoka
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
PaperLow Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- H. Hiraoka
- 2019
- JES
PaperSoft vacuum, pulsed electron-beam hardening of lithographic polymers
- J. Krishnaswamy
- L. Li
- et al.
- 2011
- Journal of Materials Research
PaperHigh-resolution polymer replication of surface topography
- Hiroyuki Hiraoka
- 2008
- Applied Physics Letters
PaperESCA and Mass Spectroscopic Studies of Degradations of Poly[bis(trifluoroethoxy)phosphazene]: Pyrolysis, Ultraviolet Light, and Electron Beam Induced Degradations
- Hiroyuki Hiraoka
- Wen-yaung Lee
- et al.
- 2002
- Macromolecules
PaperPhotolysis of benzotriazole in alcoholic glass at 77 K
- Haruo Shizuka
- Hiroshi Hiratsuka
- et al.
- 2002
- Journal of Physical Chemistry
PaperDopant-Induced Ablation of Poly(methyl methacrylate) by a 308-nm Excimer Laser
- Hiroshi Masuhara
- Hiroyuki Hiraoka
- et al.
- 2002
- Macromolecules
PaperPhotolysis of Poly (dimethacrylimide) and Related Polymers
- Hiroyuki Hiraoka
- 2002
- Macromolecules
Paper