William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Dopant-Induced Ablation of Poly(methyl methacrylate) by a 308-nm Excimer Laser
Abstract
No abstract available.
Related
Julien Autebert, Aditya Kashyap, et al.
Langmuir
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME