P.D. Kirchner, J. Woodall, et al.
IEEE T-ED
No abstract available.
P.D. Kirchner, J. Woodall, et al.
IEEE T-ED
S.E. Steen, S.J. McNab, et al.
Microlithography 2005
C.R. Lu, J.R. Anderson, et al.
Physical Review B
K. Beyzavi, K. Lee, et al.
Applied Physics Letters