Progress in large area selective silicon deposition for TFT/LCD applications
- J.H. Souk
- G.N. Parsons
- 1994
- MRS Spring Meeting 1994
Publications
8 results for J.H. Souk
Progress in large area selective silicon deposition for TFT/LCD applications
- Jun H. Souk
- Gregory N. Parsons
- 1994
- MRS Spring Meeting 1994
A-Si thin film transistors using dilute-gas plasma-enhanced chemical vapor deposition
- S.L. Wright
- M.B. Rothwell
- et al.
- 1993
- Device Research Conference 1993
IVB-6 a-Si Thin Film Transistors Using Dilute-Gas Plasma-Enhanced Chemical Vapor Deposition
- S.L. Wright
- M.B. Rothwell
- et al.
- 1993
- IEEE Transactions on Electron Devices
Low hydrogen content stoichiometric silicon nitride films deposited by plasma-enhanced chemical vapor deposition
- G.N. Parsons
- J.H. Souk
- et al.
- 1991
- Journal of Applied Physics
Oriented growth of ultrathin tungsten films on sapphire substrates
- J.H. Souk
- Armin Segmüller
- et al.
- 1987
- Journal of Applied Physics
Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA
Characterization of electron-beam deposited tungsten films on sapphire and silicon
- J.H. Souk
- J.F. O'Hanlon
- et al.
- 1985
- JVSTA