Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology

Vertical-transport FET (VTFET) has its advantage on area scaling, which enables to scale logic area beyond sub-45nm contacted gate pitch (CGP). This paper focuses on VTFET performance assessment. 1.2x effective capacitance contrasting to technology target is demonstrated based on 40CGP VTFET ring oscillator. 90% DC performance is demonstrated as well.