Advanced Multi-Vt Enabled by Selective Layer Reductions for 2nm Nanosheet Technology and Beyond
- Ruqiang Bao
- Yusuke Oniki
- et al.
- 2024
- IEDM 2024
Publications
6 results for Sankar Sankarapandian
Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
- Chen Zhang
- Seungmin Song
- et al.
- 2024
- IEDM 2024
Backside power distribution for nanosheet technologies beyond 2nm
- Ruilong Xie
- Wonhyuk Hong
- et al.
- 2024
- VLSI Technology and Circuits 2024
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Scheme
- Alma Vela Ramirez
- Sankar Sankarapandian
- et al.
- 2024
- ASMC 2024
The impact of Al on contact resistance and its suitability in fine pitch interconnects
- Fee Li Lie
- Sathya Raghavan
- et al.
- 2023
- IMAPS 2023
Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology
- Gen Tsutsui
- Seunghyun Song
- et al.
- 2022
- IEDM 2022