Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A study of the electron beam sensitivities and oxygen plasma etch rates of a variety of organosilicon polymers is discussed. The particular structures investigated include polysiloxanes, polysilmethylenes, polysilazanes. polysilanes, polysilphenylenes, and organic polymers with side silyl groups. The influence of pendant organic groups and heteroatoms in the main polymer chain on the plasma etch rates and electron beam sensitivities is also addressed. © 1985.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures