Publications

221 results at Microelectronic Engineering

High quality interfacial layer formation for Si_0.75Ge_0.25 (100) high-k metal gate stack
- - S. Siddiqui
  - R. Galatage
  - et al.
- 2020
- Microelectronic Engineering
AC conductivity analysis as a measure of low k dielectric capacitor reliability degradation due to moisture ingress
- - Cyril Cabral
  - Robert B. Laibowitz
  - et al.
- 2020
- Microelectronic Engineering
Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts
- - A. Carr
  - B. Peethala
  - et al.
- 2017
- Microelectronic Engineering
Electron beam generated plasmas: Characteristics and etching of silicon nitride
- - S. G. Walton
  - D. R. Boris
  - et al.
- 2017
- Microelectronic Engineering
Impact of HF-based cleaning solutions on via resistance for sub-10 nm BEOL structures
- - B. Peethala
  - F. Mont
  - et al.
- 2016
- Microelectronic Engineering
Low D_it HfO₂/Al₂O₃/In_0.53Ga_0.47As gate stack achieved with plasma-enhanced atomic layer deposition
- - V. Djara
  - Marilyne Sousa
  - et al.
- 2015
- Microelectronic Engineering
Impedance spectroscopy studies of moisture uptake in low-k dielectrics and its relation to reliability
- - A. Raja
  - Robert B. Laibowitz
  - et al.
- 2015
- Microelectronic Engineering
Electrical characterisation of InGaAs on insulator structures
- - K. Cherkaoui
  - Y.Y. Gomeniuk
  - et al.
- 2015
- Microelectronic Engineering
Analysis of the Pockels effect in ferroelectric barium titanate thin films on Si(0 0 1)
- - Kristy J. Kormondy
  - Stefan Abel
  - et al.
- 2015
- Microelectronic Engineering
Capillary assembly of cross-gradient particle arrays using a microfluidic chip
- - Songbo Ni
  - Mona J.K. Klein
  - et al.
- 2015
- Microelectronic Engineering