Michael Hatzakis, semiconductor industry pioneer
- J. Paraszczak
- J.M. Shaw
- et al.
- 2024
- Micro and Nano Engineering
Publications
47 results for Jane M. Shaw
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
Conducting polymers as lithographic materials
- Marie Angelopoulos
- Jane M. Shaw
- et al.
- 2004
- Polymer Engineering & Science
Poly(4‐chlorostyrene), a new high contrast negative E‐beam resist
- J. Liutkus
- M. Hatzakis
- et al.
- 2004
- Polymer Engineering & Science
Organosilicon polymers for lithographic applications
- J.M. Shaw
- M. Hatzakis
- et al.
- 2004
- Polymer Engineering & Science
Epoxy resins for deep UV lithography
- K.J. Stewart
- M. Hatzakis
- et al.
- 2004
- Polymer Engineering & Science
Surface Modification of BPDA-PDA Polyimide
- Kang-Wook Lee
- Steven P. Kowalczyk
- et al.
- 2002
- Langmuir
Surface Modification of Pmda-Oda Polyimide: Surface Structure-Adhesion Relationship
- Kang-Wook Lee
- Steven P. Kowalczyk
- et al.
- 2002
- Macromolecules
Patterning of highly conducting polyaniline films
- T. Graham
- A. Afzali
- et al.
- 2000
- Microlithography 2000
Organic transistors with low operating voltage and high mobility
- C. Dimitrakopoulos
- S. Purushothaman
- et al.
- 1999
- DRC 1999