Publications

176 results at JVSTA

Summary Abstract: Chemical processes in fluorine-based etching reactions
- - F.R. McFeely
- 1985
- JVSTA
Summary Abstract: Energy distributions of electronically excited molecules produced by ion bombardment of silicon
- - R.E. Walkup
  - Ph. Avouris
- 1985
- JVSTA
Summary Abstract: Modification of metals by low energy ions during thin film deposition
- - J.M.E. Haroer
  - J.J. Cuomo
- 1985
- JVSTA
Summary Abstract: Titanium silicide films prepared by reactive sputtering
- - V. Deline
  - F.M. d’Heurle
- 1985
- JVSTA
High resolution photoemission investigation: The oxidation of W
- - Guy Hollinger
  - F.J. HimDsel
  - et al.
- 1985
- JVSTA
Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si
- - M.L. Yu
  - D.J. Vitkavage
  - et al.
- 1985
- JVSTA
Summary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- - M. Liehr
  - P.A. Thiry
  - et al.
- 1985
- JVSTA
Summary Abstract: High performance packaging in microelectronics
- - Albert J. Blodgett
- 1985
- JVSTA
Summary Abstract: Thin films for magnetic recording technology: A review
- - J.K. Howard
- 1985
- JVSTA
Thermal desorption spectroscopy of Xe at the Si(111) as a local probe for surface structures
- - J.W. Bartha
  - U. Barjenbruch
  - et al.
- 1985
- JVSTA