E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry