Summary Abstract: Energy distributions of electronically excited molecules produced by ion bombardment of silicon

Robert W. Keyes

Physical Review B

Andreas C. Cangellaris, Karen M. Coperich, et al.

EMC 2001

Frank Stem

C R C Critical Reviews in Solid State Sciences

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films