Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical
Paper
Publications
21 results at Sensors and Actuators, A: Physical
Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical
PaperCharacterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- Terunobu Akiyama
- Andreas Tonin
- et al.
- 1998
- Sensors and Actuators, A: Physical
PaperHigh-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical
PaperA solid-state pressure-sensing microsystem for biomedical applications
- Stavros Chatzandroulis
- Dimitris Goustouridis
- et al.
- 1997
- Sensors and Actuators, A: Physical
PaperNovel miniature integrated optical goniometers
- Rino E. Kunz
- Jürg Dübendorfer
- 1997
- Sensors and Actuators, A: Physical
PaperA 400 °C silicon Hall sensor
- Sebastiann In't Hout
- Simon Middelhoek
- 1997
- Sensors and Actuators, A: Physical
PaperFabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- M. Despont
- H. Gross
- et al.
- 1996
- Sensors and Actuators, A: Physical
PaperMagnetic microactuation of torsional polysilicon structures
- Jack W. Judy
- Richard S. Muller
- 1996
- Sensors and Actuators, A: Physical
PaperOn the mass sensitivity of acoustic-plate-mode sensors
- Fabien Josse
- Reiner Dahint
- et al.
- 1996
- Sensors and Actuators, A: Physical
Paper