Publications

21 results at Sensors and Actuators, A: Physical

Wide bandwidth room-temperature THz imaging array based on antenna-coupled MOSFET bolometer
- - Thomas Morf
  - Bernhard Klein
  - et al.
- 2014
- Sensors and Actuators, A: Physical
A high precision SOI MEMS-CMOS ±4g piezoresistive accelerometer
- - Anindya Lal Roy
  - Hrishikesh Sarkar
  - et al.
- 2014
- Sensors and Actuators, A: Physical
Nanopositioner actuator energy cost and performance
- - Johan B. C. Engelen
  - Mohammed G. Khatib
  - et al.
- 2013
- Sensors and Actuators, A: Physical
Power enhancement of micro thermoelectric generators by microfluidic heat transfer packaging
- - N.Z. Wojtas
  - E. Schwyter
  - et al.
- 2012
- Sensors and Actuators, A: Physical
Shock resistance of ferromagnetic micromechanical magnetometers
- - Jeffrey K. Yee
  - Henry H. Yang
  - et al.
- 2003
- Sensors and Actuators, A: Physical
In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations
- - A. Dietzel
  - R. Berger
  - et al.
- 2002
- Sensors and Actuators, A: Physical
VLSI-NEMS chip for parallel AFM data storage
- - M. Despont
  - J. Brugger
  - et al.
- 2000
- Sensors and Actuators, A: Physical
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- - J. Brugger
  - C. Andreoli
  - et al.
- 1999
- Sensors and Actuators, A: Physical
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- - J. Brugger
  - M. Despont
  - et al.
- 1999
- Sensors and Actuators, A: Physical
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- - M.I. Lutwyche
  - C. Andreoli
  - et al.
- 1999
- Sensors and Actuators, A: Physical