Publications

13 results at SPIE Advanced Lithography + Patterning 2026

Evaluation of In-line SIMS Impact on Device Reliability and Performance
- - Jander Cruz
  - Li Xiang
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Model-Based Raman Simulations for Optimized Metrology in Nanosheet Transistor Devices
- - Stefan Schoeche
  - Aron Cepler
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Exploring the Limits of Contact Hole Patterning with High NA EUV Lithography
- - Dario Goldfarb
  - Zheng Chen
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Talk