Publications

221 results at Microelectronic Engineering

Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering
Laser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- - Hiroyuki Hiraoka
  - Sylvain Lazare
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering
Dry ridge etching of AlGaAs GRINSCH lasers
- - M. Jost
  - P. Buchmann
  - et al.
- 1990
- Microelectronic Engineering
CW and time resolved luminescence study of dry etch damage in semiconductor wires
- - B.E. Maile
  - G. Mayer
  - et al.
- 1990
- Microelectronic Engineering
Silylation of resist materials using di- and polyfunctional organosilicon compounds
- - E. Babich
  - J. Paraszczak
  - et al.
- 1990
- Microelectronic Engineering
Thermoelastic effects on x-ray lithography masks under pulsed irradiation
- - Iqbal Shareef
  - Juan R. Maldonado
  - et al.
- 1990
- Microelectronic Engineering
New high resolution and high sensitivity deep UV, x-ray, and electron beam resists
- - Michael Hatzakis
  - Kevin J. Stewart
  - et al.
- 1990
- Microelectronic Engineering