Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Annealing behavior of gold absorber in x-ray masks
- R.E. Acosta
- W.A. Johnson
- et al.
- 1992
- Microelectronic Engineering
PaperPicosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits
- H. Heinrich
- N. Pakdaman
- et al.
- 1992
- Microelectronic Engineering
PaperShallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS. Invited review paper
- Bijan Davari
- 1992
- Microelectronic Engineering
PaperOptical analysis of wet chemically etched InGaAs/InP wires
- B. Jacobs
- M. Emmerling
- et al.
- 1992
- Microelectronic Engineering
PaperOverlay measurement using the low voltage scanning electron microscope
- Michael G. Rosenfield
- A. Starikov
- 1992
- Microelectronic Engineering
PaperSiGe-base bipolar transistors for cryogenic BiCMOS applications
- John D. Cressler
- 1992
- Microelectronic Engineering
PaperAcid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
PaperElectron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
PaperPeriodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- S.J. Wind
- U. Meirav
- et al.
- 1991
- Microelectronic Engineering
Paper