Optical analysis of wet chemically etched InGaAs/InP wires
- B. Jacobs
- M. Emmerling
- et al.
- 1992
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Liquid film enhanced laser cleaning
- W. Zapka
- A.C. Tam
- et al.
- 1992
- Microelectronic Engineering
Understanding high numerical aperture optical lithography
- D. Flagello
- Alan E. Rosenbluth
- et al.
- 1992
- Microelectronic Engineering
SiCGe ternary alloys - extending Si-based heterostructures
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Microelectronic Engineering
Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
Annealing behavior of gold absorber in x-ray masks
- R.E. Acosta
- W.A. Johnson
- et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- Michael G. Rosenfield
- A. Starikov
- 1992
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- S.J. Wind
- U. Meirav
- et al.
- 1991
- Microelectronic Engineering