Publications

221 results at Microelectronic Engineering

Understanding high numerical aperture optical lithography
- - D. Flagello
  - Alan E. Rosenbluth
  - et al.
- 1992
- Microelectronic Engineering
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering
Optical analysis of wet chemically etched InGaAs/InP wires
- - B. Jacobs
  - M. Emmerling
  - et al.
- 1992
- Microelectronic Engineering
Picosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits
- - H. Heinrich
  - N. Pakdaman
  - et al.
- 1992
- Microelectronic Engineering
Annealing behavior of gold absorber in x-ray masks
- - R.E. Acosta
  - W.A. Johnson
  - et al.
- 1992
- Microelectronic Engineering
SiCGe ternary alloys - extending Si-based heterostructures
- - Subramanian S. Iyer
  - K. Eberl
  - et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- - Michael G. Rosenfield
  - A. Starikov
- 1992
- Microelectronic Engineering
Conducting polyaniline: Removable SEM discharge layer
- - Marie Angelopoulos
  - Jane M. Shaw
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering