Arrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Microscopic mechanisms of interface state generation by electrical stress
- 1993
- Microelectronic Engineering
PaperNew model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- Y. Roh
- L.P. Trombetta
- et al.
- 1993
- Microelectronic Engineering
PaperComparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
PaperEarly operating experience with the helios compact synchrotron x-ray source
- D.E. Andrews
- Chas N. Archie
- 1993
- Microelectronic Engineering
PaperLateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- H. Rothuizen
- P. Roentgen
- et al.
- 1993
- Microelectronic Engineering
PaperSiCGe ternary alloys - extending Si-based heterostructures
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Microelectronic Engineering
PaperDefinition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
PaperShallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS. Invited review paper
- Bijan Davari
- 1992
- Microelectronic Engineering
PaperPositive mode silylation process characterization
- D.C. La Tulipe
- A.T.S. Pomerene
- et al.
- 1992
- Microelectronic Engineering
Paper