Comparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
New model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- Y. Roh
- L.P. Trombetta
- et al.
- 1993
- Microelectronic Engineering
PaperHot-electron dynamics in SiO2 and the degradation of the Si/SiO2-interface
- E. Cartier
- D.J. DiMaria
- 1993
- Microelectronic Engineering
PaperPhotolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
PaperMeasurement of the effective wavelength of x-ray lithography sources
- Juan R. Maldonado
- Inna Babich
- et al.
- 1993
- Microelectronic Engineering
PaperEarly operating experience with the helios compact synchrotron x-ray source
- D.E. Andrews
- Chas N. Archie
- 1993
- Microelectronic Engineering
PaperUnderstanding high numerical aperture optical lithography
- D. Flagello
- Alan E. Rosenbluth
- et al.
- 1992
- Microelectronic Engineering
PaperAnnealing behavior of gold absorber in x-ray masks
- R.E. Acosta
- W.A. Johnson
- et al.
- 1992
- Microelectronic Engineering
PaperDefinition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
PaperSiCGe ternary alloys - extending Si-based heterostructures
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Microelectronic Engineering
Paper