Publications

221 results at Microelectronic Engineering

New model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- - Y. Roh
  - L.P. Trombetta
  - et al.
- 1993
- Microelectronic Engineering
Early operating experience with the helios compact synchrotron x-ray source
- - D.E. Andrews
  - Chas N. Archie
- 1993
- Microelectronic Engineering
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering
"Laser cleaning" removes particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1993
- Microelectronic Engineering
Carbon impurities at a Si-SiO₂ interface
- - S.I. Raider
- 1993
- Microelectronic Engineering
Understanding high numerical aperture optical lithography
- - D. Flagello
  - Alan E. Rosenbluth
  - et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- - Michael G. Rosenfield
  - A. Starikov
- 1992
- Microelectronic Engineering
Positive mode silylation process characterization
- - D.C. La Tulipe
  - A.T.S. Pomerene
  - et al.
- 1992
- Microelectronic Engineering
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering