Publications

221 results at Microelectronic Engineering

Micromechanical structures for data storage
- - T.C. Reiley
  - L.-S. Fan
  - et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- - M. Despont
  - U. Staufer
  - et al.
- 1995
- Microelectronic Engineering
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- - P. Unger
  - V. Boegli
  - et al.
- 1994
- Microelectronic Engineering
Using simulation to analyze integrated tool performance in semiconductor manufacturing
- - John Mauer
  - Roland Schelasin
- 1994
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1994
- Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering