Publications

221 results at Microelectronic Engineering

Dissociation kinetics of hydrogen-passivated (100) Si SiO₂ interface defects
- - J.H. Stathis
- 1995
- Microelectronic Engineering
A new mask lithography tool for advanced mask manufacturing
- - B.J. Grenon
  - H.C. Hamaker
  - et al.
- 1995
- Microelectronic Engineering
Doping profiling with scanning surface harmonic microscopy
- - M. Johnson
  - J.P. Bourgoin
  - et al.
- 1995
- Microelectronic Engineering
Atomic-scale analysis of quantum nanostructures with the STM
- - M. Johnson
  - M. Pfister
  - et al.
- 1995
- Microelectronic Engineering
Anomalous positive charge formation by atomic hydrogen exposure
- - R.E. Stahlbush
  - E. Cartier
  - et al.
- 1995
- Microelectronic Engineering
Atomic hydrogen-induced degradation of the Si SiO₂ structure
- - E. Cartier
  - J.H. Stathis
- 1995
- Microelectronic Engineering
Using simulation to analyze integrated tool performance in semiconductor manufacturing
- - John Mauer
  - Roland Schelasin
- 1994
- Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering
Improved underlayers for acid amplified resists
- - H.S. Sachdev
  - R.W. Kwong
  - et al.
- 1994
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1994
- Microelectronic Engineering