A new mask lithography tool for advanced mask manufacturing
- B.J. Grenon
- H.C. Hamaker
- et al.
- 1995
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Atomic hydrogen-induced degradation of the Si SiO2 structure
- E. Cartier
- J.H. Stathis
- 1995
- Microelectronic Engineering
PaperAnomalous positive charge formation by atomic hydrogen exposure
- R.E. Stahlbush
- E. Cartier
- et al.
- 1995
- Microelectronic Engineering
PaperKinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- G.M. Wallraff
- John M. Hutchinson
- et al.
- 1995
- Microelectronic Engineering
PaperStress induced leakage currents in thin oxides
- D.J. DiMaria
- 1995
- Microelectronic Engineering
PaperEnhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering
PaperFabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- R. Viswanathan
- David Seeger
- et al.
- 1994
- Microelectronic Engineering
PaperLaser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- Albert J. Fixl
- Keith A. Jenkins
- 1994
- Microelectronic Engineering
PaperSEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- Abram Jakubowicz
- Albert Oosenbrug
- 1994
- Microelectronic Engineering
PaperImproved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
Paper