Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
PaperAtomic hydrogen-induced degradation of the Si SiO2 structure
- E. Cartier
- J.H. Stathis
- 1995
- Microelectronic Engineering
PaperA new mask lithography tool for advanced mask manufacturing
- B.J. Grenon
- H.C. Hamaker
- et al.
- 1995
- Microelectronic Engineering
PaperDissociation kinetics of hydrogen-passivated (100) Si SiO2 interface defects
- 1995
- Microelectronic Engineering
PaperKinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- G.M. Wallraff
- John M. Hutchinson
- et al.
- 1995
- Microelectronic Engineering
PaperStress induced leakage currents in thin oxides
- D.J. DiMaria
- 1995
- Microelectronic Engineering
PaperAtomic-scale analysis of quantum nanostructures with the STM
- M. Johnson
- M. Pfister
- et al.
- 1995
- Microelectronic Engineering
PaperFabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- K.Y. Lee
- K. Ismail
- et al.
- 1995
- Microelectronic Engineering
PaperDetermination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- Juan R. Maldonado
- Ron DellaGuardia
- et al.
- 1995
- Microelectronic Engineering
Paper