Ion- and electron-assisted gas-surface chemistry - An important effect in plasma etching
- J.W. Coburn
- Harold F. Winters
- 2008
- Journal of Applied Physics
Paper
Publications
51 results for J.W. Coburn
Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
- J.W. Coburn
- M. Chen
- 2008
- Journal of Applied Physics
PaperA method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- U. Gerlach-Meyer
- J.W. Coburn
- et al.
- 2008
- Journal of Applied Physics
PaperMechanisms in plasma-assisted etching
- J.W. Coburn
- 2007
- Physica Scripta
PaperPlasma Sources in Analytical Mass Spectrometry
- J.W. Coburn
- W.W. Harrison
- 2006
- Applied Spectroscopy Reviews
PaperTetrafluoromethane Injected into a dc Argon Glow Discharge
- J.W. Coburn
- Eric Kay
- 2006
- Journal of Macromolecular Science: Part A - Chemistry
PaperPlasma etching — a discussion of mechanisms
- J.W. Coburn
- Harold F. Winters
- 2006
- Critical Reviews in Solid State and Materials Sciences
PaperSputter deposition of EuO thin films
- J.W. Coburn
- Kenneth Lee
- 2003
- Journal of Applied Physics
PaperA system for determining the mass and energy of particles incident on a substrate in a planar diode sputtering system
- J.W. Coburn
- 2003
- Review of Scientific Instruments
PaperPositive-ion bombardment of substrates in rf diode glow discharge sputtering
- J.W. Coburn
- Eric Kay
- 2003
- Journal of Applied Physics
Paper