Natasha C.Us, R.W. Sadowski, et al.
Plasma Chemistry and Plasma Processing
No abstract available.
Natasha C.Us, R.W. Sadowski, et al.
Plasma Chemistry and Plasma Processing
K. Köhler, J.W. Coburn, et al.
Journal of Applied Physics
Harold F. Winters, J.W. Coburn
Applied Physics Letters
J.W. Coburn, Eric Kay
Journal of Applied Physics