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PaperElectron-beam effects in depth profiling measurements with Auger electron spectroscopyJ. Ahn, C.R. Perleberg, et al.Journal of Applied Physics
PaperIon-induced volatilization (IIV): A method for quantitative measurement of the amounts of perfluoropolyether lubricant on a particulate disk surface and in the media porosityJ.W. Coburn, H.F. WintersJournal of Applied Physics
PaperA method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processesU. Gerlach-Meyer, J.W. Coburn, et al.Journal of Applied Physics
