Harold F. Winters, J.W. Coburn
Applied Physics Letters
No abstract available.
Harold F. Winters, J.W. Coburn
Applied Physics Letters
J.W. Coburn, K. Koehler
Symposium on Plasma Processing 1986
J.W. Coburn, Kenneth Lee
Journal of Applied Physics
T.J. Chuang, H.F. Winters, et al.
Applications of Surface Science