Publications

50 results for H.F. Winters

The activated, dissociative chemisorption of methane on tungsten
- - Harold F. Winters
- 2008
- The Journal of Chemical Physics
Electron-beam effects in depth profiling measurements with Auger electron spectroscopy
- - J. Ahn
  - C.R. Perleberg
  - et al.
- 2008
- Journal of Applied Physics
Influence of the altered layer on depth profiling measurements
- - Harold F. Winters
  - J.W. Coburn
- 2008
- Applied Physics Letters
The kinetic isotope effect in the dissociative chemisorption of methane
- - Harold F. Winters
- 2008
- The Journal of Chemical Physics
Ion-surface interactions in plasma etching
- - J.W. Coburn
  - H.F. Winters
  - et al.
- 2008
- Journal of Applied Physics
Plasma etching a "pseudo-black-box" approach
- - Harold F. Winters
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
The role of chemisorption in plasma etching
- - Harold F. Winters
- 2008
- Journal of Applied Physics
The etching of silicon with XeF₂ vapor
- - H.F. Winters
  - J.W. Coburn
- 2008
- Applied Physics Letters
Ion- and electron-assisted gas-surface chemistry - An important effect in plasma etching
- - J.W. Coburn
  - Harold F. Winters
- 2008
- Journal of Applied Physics
Plasma etching — a discussion of mechanisms
- - J.W. Coburn
  - Harold F. Winters
- 2006
- Critical Reviews in Solid State and Materials Sciences