Harold F. Winters, H. Coufal, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Influence of the altered layer on depth profiling measurements
Abstract
A simple phenomenological theory of alloy sputtering is developed which suggests that in some instances the depth resolution of depth profiling measurements is limited by the time it takes to create a layer of altered chemical composition at the surface.
Related
Mei-Chen Chuang, J.W. Coburn
Journal of Applied Physics
Harold F. Winters, D. Haarer
Physical Review B
J.W. Coburn, Eric Kay
Applied Physics Letters