Publications

11 results for Azalia Krasnoperova

Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- - David Melville
  - Alan E. Rosenbluth
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Overcoming the challenges of 22-nm node patterning through litho-design co-optimization
- - Martin Burkharde
  - J.C. Arnold
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Benefits and trade-offs of global source optimization in optical lithography
- - Kehan Tian
  - Azalia Krasnoperova
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Two gates are better than one
- - P. Solomon
  - K.W. Guarini
  - et al.
- 2003
- IEEE Circuits and Devices Magazine
100 nm gate lithography for double gate transistors
- - Azalia Krasnoperova
  - Ying Zhang
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Triple-self-aligned, planar double-gate MOSFETs: Devices and circuits
- - K.W. Guarini
  - P. Solomon
  - et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Evaluation of X-ray lithography using a 0.175 μm (0.245 μm² cell area) 1 Gb DRAM technology
- - Rosemary Longo
  - S. Chaloux
  - et al.
- 1998
- VLSI Technology 1998
Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- - A.C. Chen
  - A. Flamholz
  - et al.
- 1997
- Microlithography 1997
Patterning of 100 nm features using X-ray lithography
- - Azalia A. Krasnoperova
  - Scott Hector
  - et al.
- 1997
- J. Photopolym. Sci. Tech.