Performance of Zr/O/W Schottky emitters at reduced temperatures
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
13 results for M.G.R. Thomson
Energy distributions of Zr/O/W Schottky electron emission
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Applied Physics
PaperElectron-beam microcolumns for lithography and related applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperThe electrostatic moving objective lens and optimized deflection systems for microcolumns
- M.G.R. Thomson
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperElectron beam technology - SEM to microcolumn
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Microelectronic Engineering
PaperExperimental evaluation of a 20×20 mm footprint microcolumn
- E. Kratschmer
- H.S. Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ReviewElectron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Conference paperElectron-beam microcolumn technology and applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1995
- SPIE Optical Science, Engineering, and Instrumentation 1995
Conference paperHigh Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- Y. Taur
- S.J. Wind
- et al.
- 1993
- IEDM 1993
Conference paperFully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- Philip J. Coane
- Kaolin G. Chiong
- et al.
- 1993
- Microlithography 1993
Conference paper