M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Paper
Low stress development of poly(methylmethacrylate) for high aspect ratio structures
Abstract
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14:1 aspect ratios in resist were demonstrated.
Related
David B. Mitzi
Journal of Materials Chemistry
Ellen J. Yoffa, David Adler
Physical Review B
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001