Conference paper
A novel integrated reliability test system for BEOL TDDB study
Jifeng Chen, Peilin Song, et al.
ISTFA 2012
The I/O interface latchup analysis using optical and electrical testing was discussed. JEDEC78 testing procedure, an automated computer-controlled latchup test program, was developed for the analysis. Emission of microscopy was used to characterize the ignition and diffusion of latchup in a series of I/O pins of a test chip. The results show that minority carriers can diffuse underneath lines of decoupling capacitances, if the recombination length of the minority carriers is comparable with the size of the capacitance.
Jifeng Chen, Peilin Song, et al.
ISTFA 2012
Brian L. Ji, Dale J. Pearson, et al.
IEEE Trans Semicond Manuf
Franco Stellari, Alan J. Weger, et al.
ISTFA 2013
Franco Stellari, Peilin Song, et al.
APCT 2011