Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

10 Mar 2004

Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

View publication

Abstract

No abstract available.

Review

Solution-processed inorganic semiconductors

David B. Mitzi

Journal of Materials Chemistry

Paper

Hierarchical hydrodynamic flow confinement: Efficient use and retrieval of chemicals for microscale chemistry on surfaces

Julien Autebert, Aditya Kashyap, et al.

Langmuir

Conference paper

Modeling polarization for Hyper-NA lithography tools and masks

Kafai Lai, Alan E. Rosenbluth, et al.

SPIE Advanced Lithography 2007

Paper

Electron and positron channeling radiation from beryllium oxide

H.D. Dulman, R.H. Pantell, et al.

Physical Review B

View all publications