Publications

34 results for A. Mahorowala

Selective deposition of AlOx for Fully Aligned Via in nano Cu interconnects
- - Son Van Nguyen
  - Hosadurga Shobha
  - et al.
- 2021
- IITC 2021
Improving the power-performance of multicore processors through optimization of lithography and thermal processing
- - A. Gabor
  - T.A. Brunner
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Controlling line-edge roughness and reactive ion etch lag in sub-150 nm features in borophosphosilicate glass
- - Parijat Bhatnagar
  - Siddhartha Panda
  - et al.
- 2007
- Journal of Applied Physics
Mastering double exposure process window aware OPC by means of virtual targets
- - Henning Haffner
  - Zachary Baum
  - et al.
- 2006
- SPIE Photomask Technology 2006
RTA-driven intra-die variations in stage delay, and parametric sensitivities for 65nm technology
- - I. Ahsan
  - N. Zamdmer
  - et al.
- 2006
- VLSI Technology 2006
Silicon containing polymer in applications for 193 nm high NA lithography processes
- - Scan Bums
  - Dirk Pfeiffer
  - et al.
- 2006
- SPIE Advanced Lithography 2006
Integrated non-SO ₂ underlayer and improved line-edge-roughness dielectric etch process using 193 nm bilayer resist
- - Parijat Bhatnagar
  - Siddhartha Panda
  - et al.
- 2006
- Applied Physics Letters
BEOL interconnects for 45 nm node and beyond
- - R.R. Yu
  - J. Doyle
  - et al.
- 2005
- VMIC 2005
Line edge roughness reduction by plasma curing photoresists
- - Arpan P. Mahorowala
  - Kuang-Jung Chen
  - et al.
- 2005
- Microlithography 2005
Etching silicon-containing bilayer resists in ammonia-based plasmas
- - Siddhartha Panda
  - Richard Wise
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures