Q. Huang, S.W. Bedell, et al.
Electrochemical and Solid-State Letters
Paper
Compensation doping of Ba0.7Sr0.3TiO3 thin films
Abstract
We have investigated the effects of Mn impurities on Ba0.7Sr0.3TiO3 thin films using x-ray photoemission spectroscopy. Mn acts as an electron acceptor, compensating for the charge density found in nominally undoped films. This causes a greatly increased depletion width in acceptor-doped films. We also present evidence that acceptor-doped films have an increased barrier to thermionic emission of electrons from Pt contacts into the dielectric. This may explain the decrease in leakage current observed in some acceptor-doped titanates. © 1998 American Institute of Physics.
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