Publications

42 results for Deborah Neumayer

Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T_e plasma sources
- - Ashish Jagtiani
  - Hiroyuki Miyazoe
  - et al.
- 2016
- JVSTA
Induced e-beam charge impact on spatial orientation of gate-All-Around silicon wires device fabricated on boron nitride substrate
- - Shimon Levi
  - Konstantin Chirko
  - et al.
- 2015
- SPIE Advanced Lithography 2015
CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer
- - Guy M. Cohen
  - Leathen Shi
  - et al.
- 2014
- ASMC 2014
Development and characterization of advanced process technologies for the fabrication of crystalline-Si solar cells
- - Satyavolu S. Papa Rao
  - Kate Fisher
  - et al.
- 2010
- PVSC 2010
Development, characterization and interface engineering of films for enhanced amorphous silicon solar cell performance
- - P. Joshi
  - Steven E. Steen
  - et al.
- 2010
- PVSC 2010
Current transport, gate dielectrics and band gap engineering in graphene devices
- - Wenjuan Zhu
  - Vasili Perebeinos
  - et al.
- 2010
- ICSICT 2010
Silicon nitride gate dielectrics and band gap engineering in graphene layers
- - Wenjuan Zhu
  - Deborah Neumayer
  - et al.
- 2010
- Nano Letters
Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- - Kam-Leung Lee
  - Isaac Lauer
  - et al.
- 2010
- IWJT 2010
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- - S. Gates
  - D. Neumayer
  - et al.
- 2007
- Journal of Applied Physics
Critical aspects of layer transfer and alignment tolerances for 3D integration processes
- - D.C. La Tulipe
  - L.T. Shi
  - et al.
- 2006
- GBC 2006