AC conductivity analysis as a measure of low k dielectric capacitor reliability degradation due to moisture ingress
- Cyril Cabral
- Robert B. Laibowitz
- et al.
- 2020
- Microelectronic Engineering
Publications
138 results for Robert B. Laibowitz
Humidity Penetration Impact on Integrated Circuit Performance and Reliability
- Franco Stellari
- Cyril Cabral
- et al.
- 2019
- IEDM 2019
Effect of H2O on TDDB for a range of ULK ILD materials with varying damage resistance for robust and weak liners
- Eric G. Liniger
- Robert B. Laibowitz
- et al.
- 2016
- IRPS 2016
Impedance spectroscopy studies of moisture uptake in low-k dielectrics and its relation to reliability
- A. Raja
- Robert B. Laibowitz
- et al.
- 2015
- Microelectronic Engineering
Detection of charge carrier confinement into mobile ionic defects in nanoporous dielectric films for advanced interconnects
- Juan Borja
- Joel L. Plawsky
- et al.
- 2014
- JVSTA
The effect of voltage bias stress on temperature-dependent conduction properties of low-k dielectrics
- Joanna Atkin
- T.M. Shaw
- et al.
- 2012
- IRPS 2012
Probing the interface barriers of dopant-segregated silicide-Si diodes with internal photoemission
- Zhen Zhang
- Joanna Atkin
- et al.
- 2012
- IEEE T-ED
Base electrodes for high dielectric constant oxide materials in silicon technology
- A. Grill
- W. Kane
- et al.
- 2011
- Journal of Materials Research
Effects of photoinduced carrier injection on time-dependent dielectric breakdown
- J.M. Atkin
- R.B. Laibowitz
- et al.
- 2009
- IRPS 2009
The evolution of optical and electrical properties of low-k dielectrics under bias stress
- J.M. Atkin
- E. Cartier
- et al.
- 2009
- Microelectronic Engineering