Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
A 157-dot-per-inch, 262K-color, 10.5-in.-diagonal, 1280 × 1024 (SXGA) display has been fabricated using a six-mask process with Cu or Al-alloy thin-film gates. The combination of high resolution and gray-scale accuracy has been shown to render color images and text with paperlike legibility. The low-resistivity gate metallization and trilayer-type TFTs with a channel length of 6-8 μm were fabricated with a six-mask process which is extendible to larger, higher-resolution displays. A combination of double-sided driving and active line repair was used so that open gate lines or data lines did not result in visible line defects. A flexible drive-electronics system was developed to address the display and characterize its performance under different drive conditions.
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Charles H. Bennett, Aram W. Harrow, et al.
IEEE Trans. Inf. Theory