HEATING EFFECT IN HIGHLY CONDUCTING MATERIALS DURING PLASMA ETCHING.
- Y.H. Lee
- M. Chen
- 1983
- ECS Meeting 1983
Conference paper
Publications
22 results at ECS Meeting 1983
TEM STUDY OF THE EFFECT OF ACCELERATORS ON Pd-Sn COLLOIDAL CATALYSTS AND ON THE INITIATION OF ELECTROLESS Cu DEPOSITION ON EPOXY.
- J. Harkans
- J. Kim
- et al.
- 1983
- ECS Meeting 1983
Conference paperSTRUCTURAL CHARACTERISTICS OF CHEMISORBED LEAD ON SINGLE CRYSTAL COPPER SURFACES.
- D.L. Rath
- Dieter M. Kolb
- et al.
- 1983
- ECS Meeting 1983
Conference paperSTUDY OF SILICON CONTAMINATION AND NEAR-SURFACE DAMAGE CAUSED BY CF//4/H//2 REACTIVE ION ETCHING.
- G.S. Oehrlein
- R.M. Tromp
- et al.
- 1983
- ECS Meeting 1983
Conference paperTEMPERATURE DEPENDENT RESISTIVITY OF THIN FILMS OF NITRIDES OF Zr AND Hf; EFFECT OF NITROGEN CONTENT.
- L. Krusin-Elbaum
- 1983
- ECS Meeting 1983
Conference paperENHANCED DIFFUSION IN SHORT TIME ANNEALED ARSENIC AND BORON ION IMPLANTED SILICON.
- T.O. Sedgwick
- S. Cohen
- et al.
- 1983
- ECS Meeting 1983
Conference paperDEFECTS IN SILICON FILMS GROWN BY EPITAXIAL LATERAL OVERGROWTH.
- B.J. Ginsberg
- M. Arienzo
- et al.
- 1983
- ECS Meeting 1983
Conference paperETCH ANISOTROPY OF UNDOPED POLYSILICON FILMS.
- D. Favreau
- M. Chen
- et al.
- 1983
- ECS Meeting 1983
Conference paperIN SITU DOPED SILICON VIA LPCVD: INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- ECS Meeting 1983
Conference paperEFFECT OF CONTACTS ON ADVANCED BIPOLAR DEVICE CHARACTERISTICS.
- T.H. Ning
- 1983
- ECS Meeting 1983
Conference paper