Film crystallographic texture and substrate surface roughness in layered aluminum metallization
- K.P. Rodbell
- V. Svilan
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper
Publications
14 results at MRS Spring Meeting 1996
Effect of contact implants on the patterning of tungsten damascene interconnects
- J.P. Gambino
- M.A. Jaso
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper0.1 μm technology and BEOL
- T.H. Ning
- 1996
- MRS Spring Meeting 1996
Conference paperResidual stress and lattice distortion mapping of patterned devices which failed electromigration testing using the microbeam X-ray diffraction (MXRD) technique
- B.R. York
- H.L. Pfizenmayer
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperContinuous processing of sheet-like materials by microwave energy
- D.A. Lewis
- S.J. Whitehair
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperLocal and global stress distributions in BEOL metallization
- I.C. Noyan
- E. Liniger
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperElectromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperCopper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- T.M. Shaw
- C.-K. Hu
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperNanofoam porosity measured by infrared spectroscopy and refractive index
- M.I. Sanchez
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperDependence of crystallographic texture of C54 TiSi2 on thickness and linewidth in submicron CMOS structures
- V. Svilan
- K.P. Rodbell
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper